The Research of the Output Linearization of the Silicon Piezo-Resistive Pressure Sensor
碩士 === 義守大學 === 電子工程學系 === 92 === Micro pressure sensors are widely used in automotive and aerospace industries. Most of these sensors function on the principle of mechanical deformation and stresses of thin diaphragms induced by the measured pressure. Mechanically induced diaphragm deformation and...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2004
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Online Access: | http://ndltd.ncl.edu.tw/handle/50038719972339255443 |