Development of Precision Control Technology for Nano-Stage System
碩士 === 華梵大學 === 機電工程研究所 === 92 === The object of this research is to design and prototype a nanostage system to acquire nanometer displacements, as employing minute motion characteristics of piezoelectric actuators. The whole nanostage system consists of a flexible mechanical structure, a driving c...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/64974628789352956566 |