The study of Films thickness use optics

碩士 === 輔仁大學 === 物理學系 === 92 === In experiment use optical monitor system assisted magnetic sputtering growth uniform TiO2 film, Use extreme value Turn point to Control Films thickness uniform.

Bibliographic Details
Main Author: 吳俊勳
Other Authors: 凌 國 基
Format: Others
Language:zh-TW
Published: 2004
Online Access:http://ndltd.ncl.edu.tw/handle/88896803325788936679
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spelling ndltd-TW-092FJU001980042016-01-04T04:09:15Z http://ndltd.ncl.edu.tw/handle/88896803325788936679 The study of Films thickness use optics 光學監控系統輔助射頻磁控濺鍍 吳俊勳 碩士 輔仁大學 物理學系 92 In experiment use optical monitor system assisted magnetic sputtering growth uniform TiO2 film, Use extreme value Turn point to Control Films thickness uniform. 凌 國 基 2004 學位論文 ; thesis 42 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 輔仁大學 === 物理學系 === 92 === In experiment use optical monitor system assisted magnetic sputtering growth uniform TiO2 film, Use extreme value Turn point to Control Films thickness uniform.
author2 凌 國 基
author_facet 凌 國 基
吳俊勳
author 吳俊勳
spellingShingle 吳俊勳
The study of Films thickness use optics
author_sort 吳俊勳
title The study of Films thickness use optics
title_short The study of Films thickness use optics
title_full The study of Films thickness use optics
title_fullStr The study of Films thickness use optics
title_full_unstemmed The study of Films thickness use optics
title_sort study of films thickness use optics
publishDate 2004
url http://ndltd.ncl.edu.tw/handle/88896803325788936679
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