The study of Films thickness use optics
碩士 === 輔仁大學 === 物理學系 === 92 === In experiment use optical monitor system assisted magnetic sputtering growth uniform TiO2 film, Use extreme value Turn point to Control Films thickness uniform.
Main Author: | |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2004
|
Online Access: | http://ndltd.ncl.edu.tw/handle/88896803325788936679 |