Design, analysis, and fabrication of electrostatic hemispheric deformable focusing mirror
碩士 === 逢甲大學 === 機械工程學所 === 92 === To avoid warpage and have less driven voltage, two new types of electrostatic actuated micro-focusing mirror based on bulk micromachining and surface micromachining is designed in this thesis. One is circular clamped and the other is center-anchored. Simulation by f...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/95389533080642054161 |