Thermionic Emission Enhanced Sputter Deposition of PZT Thin Film
碩士 === 逢甲大學 === 材料科學所 === 92 === In recent years, micro-electromechanical systems (MEMS) have been widely investigated in order to develop intelligent sensor or actuators. Lead zirconate titanate (PZT) films are supposed to be applied in many ferroelectric devices of MEMS such as micro-actuators, se...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/14537203969709951151 |