The High Precision Positioning Control of the Piezo-actuated Positioning Stage
碩士 === 大葉大學 === 機械工程研究所碩士班 === 92 === In this paper, the ultra-high-precision positioning with piezoactuators is studied in positioning application. The hysteretic effect and creep effects of the Piezo-actuators degrade the positioning precision. To perform ultra-high-precision positioning, the hyst...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/64231195855649584530 |