The Design and Implementation of SECS-Ⅱ Communication Human-Machine Interface for Semiconductor Manufacturing Automation
碩士 === 大葉大學 === 電機工程學系碩士班 === 92 === ABSTRACT In the sharp competitive semiconductor industry, utilizing automatic manufacturing equipment to upgrade quantity and quality has been the consensus in the industry for years. There is no way to plan a complete and integrated automat...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/56075311673517132918 |