微機電壓力感測器電路設計分析與測試
碩士 === 中華大學 === 機械與航太工程研究所 === 92 === Abstract The purpose of this research is to design a circuit for silicon pressure sensors made by MEMS technology. The sensors are made by piezo-resistance elements in a form of Wheatstone bridge on a deformable membrane. The output voltage is...
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| Format: | Others |
| Language: | zh-TW |
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2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/64554913581838873021 |