Microwave Element The Suspend Structure Processing of Variable Comb-Drive Capacitor
碩士 === 中華大學 === 機械與航太工程研究所 === 92 === This thesis presents the application of the surface micromachining technology for the manufacturing of suspended comb-drive actuator variable capacitors. Surface micromachining is one type of Micro Electro - Mechanical System (MEMS) technology. This technology c...
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| Format: | Others |
| Language: | zh-TW |
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2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/76829978840612500717 |
| Summary: | 碩士 === 中華大學 === 機械與航太工程研究所 === 92 === This thesis presents the application of the surface micromachining technology for the manufacturing of suspended comb-drive actuator variable capacitors. Surface micromachining is one type of Micro Electro - Mechanical System (MEMS) technology. This technology combines photolithography、deposition and sacrificial layer process.
The operation of the suspended comb-drive variable capacitor is based on the principle of electrostatic force. The capacitance of the capacitor is controlled by the voltage and coulomb force applied on the interlaced comb structure. The capacitance varies according to the offset of the suspended comb structure. One end of the suspended comb drive is attached to the substrate; the other end is suspended in the air with fold-flex spring.
This thesis discusses semiconductor material such as ploy silicon for the manufacturing of suspended comb-drive variable capacitors. The electro-mechanical characteristics of the variable capacitors manufactured in this thesis with respect to the frequencies, driving voltages, and offsets of the suspended structure.
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