Microwave Element The Suspend Structure Processing of Variable Comb-Drive Capacitor
碩士 === 中華大學 === 機械與航太工程研究所 === 92 === This thesis presents the application of the surface micromachining technology for the manufacturing of suspended comb-drive actuator variable capacitors. Surface micromachining is one type of Micro Electro - Mechanical System (MEMS) technology. This technology c...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/76829978840612500717 |