Preparation of Piezoelectric Lead Zirconium Titanate Thick Films and Surface Acoustic Wave Filter Devices by Sol-Gel Method
碩士 === 長庚大學 === 化工與材料工程研究所 === 92 === The objectives of this research are to prepare piezoelectric lead zirconate titanate (PZT) thick films and to incoperate semiconductor process technology to fabricate surface acoustic wave (SAW) filters. In addition, the effects of PZT powders and dispersant as...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/20689419510252462819 |