A study of optical thin film deposited by e-beam deposition for UV application

碩士 === 元智大學 === 電機工程學系 === 91 === Early in 1817, Fraunhofer had made the anti-reflection thin films with acid-corrosion method. However, the optical films were not developed well until the vacuum deposition equipment appears. Since that application of the optical thin films were widely used due to t...

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Bibliographic Details
Main Authors: Hung Pin Chen, 陳宏彬
Other Authors: Chung Ping Liu
Format: Others
Language:zh-TW
Published: 2003
Online Access:http://ndltd.ncl.edu.tw/handle/99117613079992978249