A study of optical thin film deposited by e-beam deposition for UV application
碩士 === 元智大學 === 電機工程學系 === 91 === Early in 1817, Fraunhofer had made the anti-reflection thin films with acid-corrosion method. However, the optical films were not developed well until the vacuum deposition equipment appears. Since that application of the optical thin films were widely used due to t...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2003
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Online Access: | http://ndltd.ncl.edu.tw/handle/99117613079992978249 |