A Colored Timed Object-oriented Petri Net Approach for Modeling and Scheduling of Cluster Tool

A Colored Timed Object-oriented Petri Net Approach for Modeling and Scheduling of Cluster Tool

碩士 === 東海大學 === 工業工程學系 === 91 === Multi-chamber cluster tool, which consists of multi-chambers loaded and unloaded by different types of robots, are commonly used in semiconductor fabs, the successfulness of its corresponding shop floor scheduling and control system will greatly affect th...

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Main Authors: Chien-Hao Li, 李健豪
Other Authors: Li-Chih Wang
Format: Others
Language:zh-TW
Published: 2003
Online Access:http://ndltd.ncl.edu.tw/handle/82949145192534346100
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spelling ndltd-TW-091THU000300392015-10-13T13:35:30Z http://ndltd.ncl.edu.tw/handle/82949145192534346100 A Colored Timed Object-oriented Petri Net Approach for Modeling and Scheduling of Cluster Tool 應用彩色時間性物件導向斐氏圖於多腔體設備之建模與排程 Chien-Hao Li 李健豪 碩士 東海大學 工業工程學系 91 Multi-chamber cluster tool, which consists of multi-chambers loaded and unloaded by different types of robots, are commonly used in semiconductor fabs, the successfulness of its corresponding shop floor scheduling and control system will greatly affect the effectiveness of the fab’s performance. However, both the flexibility of chamber’s processing capability and the constraints of shared resources make the scheduling (i.e., resource allocation) and performance evaluation to be very complicated. The objective of this research is to develop a approach, based on the CTOPN (Colored Timed Object-oriented Petri Net) model, for modeling and scheduling a multi-chamber cluster tool system. Li-Chih Wang 王立志 2003 學位論文 ; thesis 87 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 東海大學 === 工業工程學系 === 91 === Multi-chamber cluster tool, which consists of multi-chambers loaded and unloaded by different types of robots, are commonly used in semiconductor fabs, the successfulness of its corresponding shop floor scheduling and control system will greatly affect the effectiveness of the fab’s performance. However, both the flexibility of chamber’s processing capability and the constraints of shared resources make the scheduling (i.e., resource allocation) and performance evaluation to be very complicated. The objective of this research is to develop a approach, based on the CTOPN (Colored Timed Object-oriented Petri Net) model, for modeling and scheduling a multi-chamber cluster tool system.
author2 Li-Chih Wang
author_facet Li-Chih Wang
Chien-Hao Li
李健豪
author Chien-Hao Li
李健豪
spellingShingle Chien-Hao Li
李健豪
A Colored Timed Object-oriented Petri Net Approach for Modeling and Scheduling of Cluster Tool
author_sort Chien-Hao Li
title A Colored Timed Object-oriented Petri Net Approach for Modeling and Scheduling of Cluster Tool
title_short A Colored Timed Object-oriented Petri Net Approach for Modeling and Scheduling of Cluster Tool
title_full A Colored Timed Object-oriented Petri Net Approach for Modeling and Scheduling of Cluster Tool
title_fullStr A Colored Timed Object-oriented Petri Net Approach for Modeling and Scheduling of Cluster Tool
title_full_unstemmed A Colored Timed Object-oriented Petri Net Approach for Modeling and Scheduling of Cluster Tool
title_sort colored timed object-oriented petri net approach for modeling and scheduling of cluster tool
publishDate 2003
url http://ndltd.ncl.edu.tw/handle/82949145192534346100
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