A Colored Timed Object-oriented Petri Net Approach for Modeling and Scheduling of Cluster Tool
碩士 === 東海大學 === 工業工程學系 === 91 === Multi-chamber cluster tool, which consists of multi-chambers loaded and unloaded by different types of robots, are commonly used in semiconductor fabs, the successfulness of its corresponding shop floor scheduling and control system will greatly affect th...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/82949145192534346100 |