Influence of Ultrasonic Irradiation on Electroless Copper Metallization of ULSI
碩士 === 南台科技大學 === 化學工程系 === 91 === In our study, the using of Co(II) as a reducing agent and the electroless copper plating electrolyte which pH is near 7.0, make it possible to improve the environments during and after the operation. On the other hand, we make the best use of the effects of jet flo...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/07069351773886098549 |