A study of the interfacial reaction in a TaN/Ta/Si(100) system
碩士 === 國立臺灣科技大學 === 機械工程系 === 91 === Abstract We have investigated the interfacial reactions in a TaN/Ta/Si(100) system after the deposition of Ta and TaN on an 8" Si wafer. The thickness of the Ta/TaN was about 500Å/100Å. The specimens were conducted in annealing procedures for temp...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/10886186339119722092 |