Research on Planarization of α-Phase Single Crystal Sapphire Wafer
碩士 === 國立臺灣科技大學 === 機械工程系 === 91 === This research is to investigate the Machano-Chemical Polishing（MCP）single crystal of α-phase Aluminum Oxide Sapphire Wafer or the Sapphire Wafer （SW） with the SiO2 abrasives. A Damped Motion Model （DMM）Has been developed to be the process model of MCP of sapphire...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/14800875226479719809 |