CMOS compatible Film Bulk Acoustics Wave Resonator and Application
碩士 === 國立臺灣大學 === 應用力學研究所 === 91 === Due to the rapid development of communication, system on a chip (SOC) is a trend for integration. However, passive devices are hard to integrate owing to the natural loss mechanism on Silicon. Film bulk acoustic wave resonator (FBAR) has the potential...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/68349779006557662869 |