Dynamic Nanoindentation Using Atomic Force Microscopy

• Main Authors: Hou Hao Yuan, 侯皓元
• Other Authors: S. H. Chang
• Format: Others
• Language: zh-TW
• Published: 2003
• Online Access: http://ndltd.ncl.edu.tw/handle/26798834554372453290

碩士 === 國立臺灣大學 === 機械工程學研究所 === 91 === In resent years, the mature of Micro-Electro-Mechanical System (MEMs) and the rapid development of Nano-Technology make it possible to manufacture mechanical and electrical devices in nano-scale. The system miniaturization is powered by enhancement in performance and efficiency. As to know the performance and life cycle of such systems, it is necessary to measure its mechanical properties. To measure mechanical properties in nano-scale, nanoindentation instruments are used instead of traditional measuring instruments. Most nanoindentation instruments use Depth-Sensing-Indentation (DSI) mechanism. This technique has been improved from static testing into dynamic measuring method named Continuous Stiffness Measurement. Besides DSI instrument, Atomic Force Microscopy (AFM) could also be used to perform nanoindentation. But only static testing method was developed. In this paper, dynamic indentation method using AFM was build by applying a Piezo-Electric Transducer (PZT) stage in series with AFM tip. The result were compared with MTS Nano Indenter and Rheometrics Solids AnalyzerⅡ. The outcome was proved to be very successful.