Dynamic Nanoindentation Using Atomic Force Microscopy
碩士 === 國立臺灣大學 === 機械工程學研究所 === 91 === In resent years, the mature of Micro-Electro-Mechanical System (MEMs) and the rapid development of Nano-Technology make it possible to manufacture mechanical and electrical devices in nano-scale. The system miniaturization is powered by enhancement in...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/26798834554372453290 |