Novel method of 3D nano- and micro-lithography fabrication system
碩士 === 國立臺灣大學 === 機械工程學研究所 === 91 === The 3D-micromachining is a key technology in minimization machine. Anisotropy etching method is the most popular method to fabricate 3D microstructure in MEMS. But, It is hard to MEMS machine arbitrary 3D microstructure. Now, many kind of 3D microstru...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/10331654752580331706 |