Fabrication of the Electrostatic Microactuator for Optical Switch Application by LIGA-like Process
碩士 === 國立臺灣師範大學 === 工業教育研究所 === 91 === LIGA process, which combines x-ray deep lithography, electroforming and micromolding techniques, is a major method for fabricating sub-micro microstructures with very high aspect ratio and batch production. However, standard LIGA whose lithographic source is x-...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/63674342404470243754 |