Advanced Image-Spectrum Technique: The Investigation of Dielectric Property and Thermal Stability of Low-k Material in Cu Metallization
博士 === 國立清華大學 === 工程與系統科學系 === 91 === In this thesis, we developed an advanced microscopy technique：image-spectrum technique to study the dielectric property and thermal stability of Black DiamondTM dielectric materials for copper metallization. In my dissertation, I used newly developed...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/47224646887139034119 |