Characterization of Mechanical Properties of Thin films Using Micromachined Structures
博士 === 國立清華大學 === 動力機械工程學系 === 91 === Microelectromechanical system (MEMS) contains microsensors, microactuators, micromechanical structures, and integrated circuits. Since the micromachining fabrication processes are improved drastically, plenty of micromachined devices have been developed and comm...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/01174205754067691809 |