Geometric Effects on Stress-Induced Bending of Micromachined Bilayer Structures
博士 === 國立清華大學 === 動力機械工程學系 === 91 === Today a fast growing interest in microsystems exists both in the academic research world and in commercial industrial products. One reason for this evolution is the sophisticated processing techniques and production methods associated with silicon tec...
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| Format: | Others |
| Language: | en_US |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/67905436213136048093 |