The Study on the Influence of Various Bottom Electrode Materials to Ta2O5 Thin Films Deposited by Chemical Vapor Deposition for DRAMs Applications
博士 === 國立清華大學 === 材料科學工程學系 === 91 ===
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/97336789512650441152 |