High Frequency Pulse Plating in Acid Copper System
博士 === 國立清華大學 === 化學工程學系 === 91 === In this dissertation, the effects of high frequency pulse plating on copper deposition in acid copper system were theoretically and experimentally studied. In the part of theoretical analysis, numerical simulations were employed to predict the influence of additiv...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/94402318544442499309 |