Study on the Polishing Characteristics of Silicon Wafer for New Type Ultraprecision Polisher
碩士 === 國立中山大學 === 機械與機電工程學系研究所 === 91 === In conventional abrasive machining , it must using dresser to dress the surface of polishing disc periodically , in order for polishing disc to maintain its ability of machining , and then ensuring the quality of work piece. It will make polishing disk thin...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/83368648026027811670 |