The Properties of Tantalate Modified Lithium Niobate Pyroelectric Thin Film Detectors Prepared by the Sol-Gel Processes
碩士 === 國立中山大學 === 電機工程學系研究所 === 91 === The Ta-modified niobate lithium [LiNb1-xTaxO3, abbreviated to LNT] thin films were deposited on Pt/Ti/SiO2/Si substrates by spin coating with sol-gel technology and rapid thermal processing in this thesis. 1,3 propanediol was used as solvent to minimize the num...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2003
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Online Access: | http://ndltd.ncl.edu.tw/handle/05737946486289979714 |