Growth of Boron-doped Diamond Films on Porous Silicon by Microwave Plasma Chemical Vapor Deposition
碩士 === 國立中山大學 === 物理學系研究所 === 91 === Synthetic diamond thin films have potential for fabricating high-temperature semiconducting and optical devices because of its extraordinary properties. In this work, a microwave plasma chemical vapor deposition system has been setup. A two-steps deposition proce...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/63852928769722690310 |