Thermal and flow analysis of the mass flow controller
碩士 === 國立屏東科技大學 === 機械工程系 === 91 === The purpose of this study is to explore a critical component of the equipment for fabricating the semiconductor, the mass flow controller (MFC). Numerical simulation software (DesignSTAR & Flow) is used to analyze the loss coefficient from the gate valve and...
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2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/84537458685184711174 |
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ndltd-TW-091NPUST4890092016-12-22T04:12:25Z http://ndltd.ncl.edu.tw/handle/84537458685184711174 Thermal and flow analysis of the mass flow controller 質量流量計的流控分析 林史昇 碩士 國立屏東科技大學 機械工程系 91 The purpose of this study is to explore a critical component of the equipment for fabricating the semiconductor, the mass flow controller (MFC). Numerical simulation software (DesignSTAR & Flow) is used to analyze the loss coefficient from the gate valve and bypass tubes which are important parts of the MFC. Simulation results show that the Re number have an inverse effect with the loss coefficient on fixed valve opening and same ratio of pipe radius. 姜庭隆 2003 學位論文 ; thesis 79 zh-TW |
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NDLTD |
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zh-TW |
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Others
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NDLTD |
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碩士 === 國立屏東科技大學 === 機械工程系 === 91 === The purpose of this study is to explore a critical component of the equipment for fabricating the semiconductor, the mass flow controller (MFC). Numerical simulation software (DesignSTAR & Flow) is used to analyze the loss coefficient from the gate valve and bypass tubes which are important parts of the MFC. Simulation results show that the Re number have an inverse effect with the loss coefficient on fixed valve opening and same ratio of pipe radius.
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| author2 |
姜庭隆 |
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姜庭隆 林史昇 |
| author |
林史昇 |
| spellingShingle |
林史昇 Thermal and flow analysis of the mass flow controller |
| author_sort |
林史昇 |
| title |
Thermal and flow analysis of the mass flow controller |
| title_short |
Thermal and flow analysis of the mass flow controller |
| title_full |
Thermal and flow analysis of the mass flow controller |
| title_fullStr |
Thermal and flow analysis of the mass flow controller |
| title_full_unstemmed |
Thermal and flow analysis of the mass flow controller |
| title_sort |
thermal and flow analysis of the mass flow controller |
| publishDate |
2003 |
| url |
http://ndltd.ncl.edu.tw/handle/84537458685184711174 |
| work_keys_str_mv |
AT línshǐshēng thermalandflowanalysisofthemassflowcontroller AT línshǐshēng zhìliàngliúliàngjìdeliúkòngfēnxī |
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1718402971034714112 |