Thermal and flow analysis of the mass flow controller
碩士 === 國立屏東科技大學 === 機械工程系 === 91 === The purpose of this study is to explore a critical component of the equipment for fabricating the semiconductor, the mass flow controller (MFC). Numerical simulation software (DesignSTAR & Flow) is used to analyze the loss coefficient from the gate valve and...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/84537458685184711174 |