Preparation and Characterization of c-BN and c-BN on Nanodiamond Thin Films in BF3-N2-H2-Ar System
碩士 === 國立東華大學 === 材料科學與工程學系 === 91 === Cubic boron nitride thin films(c-BN) were deposited on Si(111) in BF3-N2-Ar-H2 system with various processing parameters by means of microwave plasma-enhanced chemical vapor deposition (MPCVD). The results indicate that the more nitrogen is introduced in the r...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/42710640833634239081 |