Dynamic characterization analysis of micropositioning stage
碩士 === 國立彰化師範大學 === 機電工程學系 === 91 === The aim of this paper is to design and analyze the XY Piezo-driven stage based on flexure hinges for nano/micro positioning. Theoretical derivation, computer engineering simulated analysis and experimental results are examined in this thesis. First the Lagrange...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/34068075083723043022 |