Properties analysis of AZO/Ag:Pd multi-layer transparent conducting films by reactive RF magnetron sputtering
碩士 === 國立彰化師範大學 === 機電工程學系 === 91 === The study aims at the multi-layer deposition of AZO（ZnO：Al） and Ag/Pd thin films were grown on type 1737F Corning glass by RF magnetron sputtering method. The process parameters of this study include RF power from 50 to 350 watts, oxygen content from 0% to 20% o...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/98223642615396897716 |