AlN capping layer for ion implantation
碩士 === 國立中央大學 === 物理研究所 === 91 === In this thesis, we deposited an AlN capping layer on GaN to prevent the decomposition of GaN surface. GaN films were grown by MOCVD at about 1050℃. In the thermal annealing process after ion implantation, the temperature higher than 1050℃ will cause the decompositi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/98591244598944506827 |