Local oxidation of GaAS and GaN using atomic force microscope
碩士 === 國立中央大學 === 物理研究所 === 91 === An atomic force microscope (AFM) tip-induced local oxidation have attracted many scientists involved in relative investigations after 1990. It have already become a promising method to fabric nanometer-scale electronic devices. Si is not the only choice of the mate...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/53247037274282638392 |