Fabrication of Three-dimensional Devices with Electron Beam Lithography and Surface Treatment for Application
碩士 === 國立中央大學 === 化學工程與材料工程研究所 === 91 === Abstract There are two major parts in this thesis. One is the fabrication of three-dimensional non-planar devices with electron beam lithography. The other is the surface treatment and characterization for application in microfluidic device. The design o...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/42513844926132641738 |