The Calibration and Application of 3D Image Measurement Machine

碩士 === 國立交通大學 === 精密與自動化工程學程碩士班 === 91 === The precision of tool machine has been improved from micrometer(μm) into nanometer(nm) under the request of semiconduct and micromachining industry recently . A small discrepancy will lead to a great error, so calibration of precision measurement...

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Bibliographic Details
Main Authors: Huan-Lien Lu, 盧煥連
Other Authors: Pi-Ying Cheng
Format: Others
Language:zh-TW
Published: 2003
Online Access:http://ndltd.ncl.edu.tw/handle/65857928026717424853

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