The Calibration and Application of 3D Image Measurement Machine
碩士 === 國立交通大學 === 精密與自動化工程學程碩士班 === 91 === The precision of tool machine has been improved from micrometer(μm) into nanometer(nm) under the request of semiconduct and micromachining industry recently . A small discrepancy will lead to a great error, so calibration of precision measurement...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/65857928026717424853 |