The Calibration and Application of 3D Image Measurement Machine
碩士 === 國立交通大學 === 精密與自動化工程學程碩士班 === 91 === The precision of tool machine has been improved from micrometer(μm) into nanometer(nm) under the request of semiconduct and micromachining industry recently . A small discrepancy will lead to a great error, so calibration of precision measurement...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/65857928026717424853 |
| Summary: | 碩士 === 國立交通大學 === 精密與自動化工程學程碩士班 === 91 === The precision of tool machine has been improved from micrometer(μm) into nanometer(nm) under the request of semiconduct and micromachining industry recently . A small discrepancy will lead to a great error, so calibration of precision measurement instrument is necessary.
This paper proposes a novel calibration technology for a new kind of 3D measurement system developed by CIDM Lab. The 3D measurement system composes of two microstepping motors and an AC servomotor to drive the smart CCD camera to assigned position. This measurement system is capable of 3D coordinate measurement and moving objects tracking automatically. However, sliding and rotational errors of the positioning mechanism are the critical precision issues of this system. The system has been carefully reconstructed and added on some fine tune mechanism to improve the position accuracy of smart CCD camera. Furthermore, the external and internal factors of measurement accuracy are also studied and identified by using statistical method. Presently, this measurement system can be applied to measure the point coordinate of a 3D object within 600 mm distance with the maximum error less than ± 50μm. The proposed image type 3D measurement machine can be applied to geometry alignment of machine assembly etc. effectively and efficiently.
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