A study on silicon mold Insert fabrication and micro hot embossing of polymer splitter
碩士 === 國立交通大學 === 精密與自動化工程學程碩士班 === 91 === This research focuses on the manufacturing of multimode polymer splitter. MEMS fabricating process was first adopted for the fabrication of four inches silicon mold insert and then the micro hot embossing technique was applied on optical class PMMA material...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/30909393520637916066 |