A Combined Waste Gas-Particle Removal System for Semiconductor Industry
碩士 === 國立交通大學 === 環境工程所 === 91 === The packed tower inside a thermal-type local scrubber can''t remove particles generated in the reaction chamber with high efficiency. It will cause the emission of fine particles. The study combines a local scrubber and a high efficiency venturi scrubber...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/80310977290522547941 |