Development of A Micro Positioner by Long Stretch Micro Drives
碩士 === 國立交通大學 === 機械工程系 === 91 === A metal-base surface micromaching technology is developed to realize a long-stretch micro drives (LSMD) and a micro positioner device is designed and fabricated here. This process includes lithography , sacrificial layer and electroplating technique. The thickness...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/54434692205716055062 |