Study On Capacitive Proximity Sensors Using MEMS Technology
碩士 === 國立交通大學 === 機械工程系 === 91 === In this thesis, MEMS Technology is used to develop the micro proximity sensors. The sensors are designed to detect the position of objects with different electric properties, which include grounding conductors, floating conductors and dielectric materia...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/13288386559699572380 |