FABRICATION AND CHARACTERIZATION OF P-CHANNEL SHOCKTTY BARRIER POLY-SI THIN-FILM TRANSISTORS WITH PTSI SOURCE/DRAIN
碩士 === 國立交通大學 === 電子工程系 === 91 === In this thesis, we have fabricated and characterized Shocktty barrier Poly-Si thin-film transistors (SBTFTs) with PtSi Source/Drain and field-induced drain (FID). The FID-SBTFT features an un-doped poly-Si channel layer with an offset channel region, a t...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2003
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Online Access: | http://ndltd.ncl.edu.tw/handle/25610033292873026036 |