SPC for Machine Particle Counts in Semiconductor Manufacturing
碩士 === 國立交通大學 === 工業工程與管理系 === 91 === With increasing competition in the semiconductor industry, semiconductor manufacturers are making efforts to increase their productivity. The yield on each wafer is an important index to evaluate productivity. To enhance the yield of IC products, statistical pro...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/85827208403407646684 |