Flow-Balance Dispatching Rules for Photo Area With Dedicated Machines
碩士 === 國立交通大學 === 工業工程與管理系 === 91 === The improvement of semiconductor manufacturing technology yields a machine-dedication characteristic. In a wafer fab, a wafer has to visit a workstation several times. A workstation involves a group of machines that are functionally identical. Yet, for some crit...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/13120922258433683518 |