Process Control Chart for Wafer Defects and Clustering Using Fuzzy Theory
碩士 === 國立交通大學 === 工業工程與管理系 === 91 === Integrated circuits (IC) manufacturers usually employ c-charts to monitor wafer defects. As the surface area of the wafer increases, the clustering phenomenon of wafer defects becomes apparent. The defect clustering causes the Poisson based c-chart to have many...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/42359678104928537367 |